Gas Delivery System Product Specification

Gas Channel
Flow Rates: 0.5 SCCM – 20 SLPM
Operating Range: 0.2% to 100% F.S.
Accuracy: ±0.6% of Reading + 0.2% F.C.
MFC Response Time: 100 msec
Operating Temperature: -10℃ to 80℃

Gas Valves
Programmable 3-Way and 4-Way Valves
Operating Voltage: 24 V DC
Power Consumption: 7 Watts
Max. Operating Pressure: 100 psi
Stainless steel w/Viton® Wetted Surface

GDS Plumbing
1/4” and 1/8” Swagelok® Bulkheads
Stainless Steel and Teflon Tubing
Independent Test Gas and RH Vents

Data Logging (1 Hz)
MFC Pressure Reading (PSIA)
MFC Temperature Reading (℃)
MFC Mass Flow Reading (sccm)
Experiment Time

Test Date and Time
Valve Actuation Status
Trigger State
Automatic File Name ProductionDigital Triggers
0-5 V DC Output
5 V DC Input

Power
120 V AC / 60 Hz (US)
5-Amp Breaker
International Configurations Available
336 Watts

Physical Characteristics
Weight: Approx. 38 – 114 lb.
Dimension: 21” L x 17.2” W x 12.8” H
Volume: 2.65 ft3
Operating Range: -10℃ to 50℃
Rack Mountable